Review of measurement methods for areal surface roughness

被引：12
|
作者：
He B.-F. [1 ]
Ding S.-Y. [1 ]
Wei C.-E. [1 ]
Liu B.-X. [1 ]
Shi Z.-Y. [1 ]
机构：
[1] Beijing Engineering Research Center of Precision Measurement Technology and Instruments, Beijing University of Technology, Beijing
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2019年 / 27卷 / 01期
关键词：
Areal surface roughness; Contact measurement; Measurement methods; Nanometer-scale surface roughness analysis; Non-contact measurement;
D O I：
10.3788/OPE.20192701.0078
中图分类号：
学科分类号：
摘要：
The measurement of surface roughness is a crucial tool for characterizing engineering surfaces. After more than 20 years of development, areal surface roughness has become a key factor that reflects the characteristics of engineering surfaces. This study includes summaries and comparisons of the characteristics of areal surface roughness, contact and non-contact measurement methods, and nanometer-scale surface roughness analysis methods. The applications and limitations of existing methods are also analyzed, and the direction for future development is presented. © 2019, Science Press. All right reserved.
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页码：78 / 93
页数：15
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