Electrical Properties of CO2/Ar Pulse Modulation Radio-frequency Discharge at Atmospheric Pressure

被引：0
|
作者：
Zhang K. [1 ,2 ]
Zhang S. [1 ]
Gao Y. [1 ]
Sun H. [1 ,2 ]
Yan P. [1 ,2 ]
Shao T. [1 ,2 ,3 ]
机构：
[1] Key Laboratory of Power Electronics and Electric Drive, Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing
[2] University of Chinese Academy of Sciences, Beijing
[3] Dalian National Laboratory for Clean Energy, Dalian
来源：
Gaodianya Jishu/High Voltage Engineering | 2019年 / 45卷 / 05期
基金：
中国国家自然科学基金;
关键词：
Atmospheric pressure RF discharge; Duty cycle; Modulation frequency; Pattern transformation voltage; U-I characteristics;
D O I：
10.13336/j.1003-6520.hve.20190430006
中图分类号：
学科分类号：
摘要：
Pulse modulation radio-frequency (RF) has lots of adjustable parameters (modulation frequency, duty cycle, input power and so on), which can regulate plasma parameters at a large scope. Compared to AC or DC discharge, RF discharge has its distinctive features. We experimentally investigated the electrical properties of Ar/CO2 discharge driven by a 13.56 MHz RF power system at atmospheric pressure, and investigated the influences of modulation parameters and gas composition on the discharge initial voltage, α-γ pattern transformation voltage, and the volt-ampere(U-I) curve. The experimental results show that change of modulation parameters and gas composition can affect the breakdown and U-I characteristics to a large extent. The decrease of duty ratio can improve the breakdown voltage, mode transformation voltage and operating range of α mode, but the decrease of CO2 content can bring the opposite effect which the modulation frequency shows a non-monotonic effect on the above characteristics. This study provides more options for RF discharge plasma technology to improve CO2 utilization efficiency. © 2019, High Voltage Engineering Editorial Department of CEPRI. All right reserved.
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页码：1396 / 1403
页数：7
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