Electron-spin-resonance and electrically detected-magnetic-resonance characterization on P bC center in various 4H-SiC(0001)/SiO2 interfaces

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作者
Umeda, T. [1 ]
Nakano, Y. [1 ]
Higa, E. [1 ]
Okuda, T. [2 ]
Kimoto, T. [2 ]
Hosoi, T. [3 ]
Watanabe, H. [3 ]
Sometani, M. [4 ]
Harada, S. [4 ]
机构
[1] Institute of Applied Physics, University of Tsukuba, Tsukuba,305-8573, Japan
[2] Graduate School of Engineering, Kyoto University, Kyoto,615-8510, Japan
[3] Graduate School of Engineering, Osaka University, Osaka,565-0871, Japan
[4] National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba,305-8569, Japan
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Journal of Applied Physics | 2020年 / 127卷 / 14期
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