Electron-spin-resonance and electrically detected-magnetic-resonance characterization on P bC center in various 4H-SiC(0001)/SiO2 interfaces

被引:0
|
作者
Umeda, T. [1 ]
Nakano, Y. [1 ]
Higa, E. [1 ]
Okuda, T. [2 ]
Kimoto, T. [2 ]
Hosoi, T. [3 ]
Watanabe, H. [3 ]
Sometani, M. [4 ]
Harada, S. [4 ]
机构
[1] Institute of Applied Physics, University of Tsukuba, Tsukuba,305-8573, Japan
[2] Graduate School of Engineering, Kyoto University, Kyoto,615-8510, Japan
[3] Graduate School of Engineering, Osaka University, Osaka,565-0871, Japan
[4] National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba,305-8569, Japan
来源
Journal of Applied Physics | 2020年 / 127卷 / 14期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
Journal article (JA)
引用
收藏
相关论文
共 50 条
  • [1] Electron-spin-resonance and electrically detected-magnetic-resonance characterization on PbC center in various 4H-SiC(0001)/SiO2 interfaces
    Umeda, T.
    Nakano, Y.
    Higa, E.
    Okuda, T.
    Kimoto, T.
    Hosoi, T.
    Watanabe, H.
    Sometani, M.
    Harada, S.
    JOURNAL OF APPLIED PHYSICS, 2020, 127 (14)
  • [2] Electrically detected-magnetic-resonance identifications of defects at 4H-SiC(0001 over bar )/SiO2 interfaces with wet oxidation
    Umeda, T.
    Kagoyama, Y.
    Tomita, K.
    Abe, Y.
    Sometani, M.
    Okamoto, M.
    Harada, S.
    Hatakeyama, T.
    APPLIED PHYSICS LETTERS, 2019, 115 (15)
  • [3] Interface carbon defects at 4H-SiC(0001)/SiO2 interfaces studied by electron-spin-resonance spectroscopy
    Umeda, T.
    Kim, G-W
    Okuda, T.
    Sometani, M.
    Kimoto, T.
    Harada, S.
    APPLIED PHYSICS LETTERS, 2018, 113 (06)
  • [4] Electrically detected magnetic resonance of carbon dangling bonds at the Si-face 4H-SiC/SiO2 interface
    Gruber, G.
    Cottom, J.
    Meszaros, R.
    Koch, M.
    Pobegen, G.
    Aichinger, T.
    Peters, D.
    Hadley, P.
    JOURNAL OF APPLIED PHYSICS, 2018, 123 (16)
  • [6] Recombination defects at the 4H-SiC/SiO2 interface investigated with electrically detected magnetic resonance and ab initio calculations
    Cottom, J.
    Gruber, G.
    Pobegen, G.
    Aichinger, T.
    Shluger, A. L.
    JOURNAL OF APPLIED PHYSICS, 2018, 124 (04)
  • [8] Relationship Between the 4H-SiC/SiO2 Interface Structure and Electronic Properties Explored by Electrically Detected Magnetic Resonance
    Anders, Mark A.
    Lenahan, Patrick M.
    Cochrane, Corey J.
    Lelis, Aivars J.
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2015, 62 (02) : 301 - 308
  • [9] Electrically Detected Magnetic Resonance Study of NBTI in 4H-SiC MOSFETs
    Anders, M. A.
    Lenahan, P. M.
    Follman, J.
    Arthur, S. D.
    McMahon, J.
    Yu, L.
    Zhu, X.
    Lelis, A. J.
    2014 IEEE INTERNATIONAL INTEGRATED RELIABILITY WORKSHOP FINAL REPORT (IIRW), 2014, : 16 - 19
  • [10] Characterization of SiO2/4H-SiC Interfaces in 4H-SiC MOSFETs: A Review
    Fiorenza, Patrick
    Giannazzo, Filippo
    Roccaforte, Fabrizio
    ENERGIES, 2019, 12 (12)