Analysis of Mode I and II Crack tip Stress Fields for MEMS Structures with Cubic Elastic Anisotropy

被引：0
|
作者：
Kato F. [1 ]
Nakahara T. [1 ]
Toriyama T. [2 ]
机构：
[1] Graduate School of Science and Engineering, Ritsumeikan University, Noji-higashi, Kusatsu
[2] Department of Mechanical Engineering, Ritsumeikan University, Noji-higashi, Kusatsu
来源：
Zairyo/Journal of the Society of Materials Science, Japan | 2022年 / 71卷 / 11期
关键词：
3C-SiC; Anisotropic solids; Crack tip stress field; Dislocation; MEMS structures; Mixed mode; Si;
D O I：
10.2472/jsms.71.879
中图分类号：
学科分类号：
摘要：
This paper addresses analysis of mode I and II crack tip singular stress fields in single crystal silicon and 3C-SiC used as MEMS mechanical structures. Fundamental solutions of anisotropic elastic fields of isolated dislocations obtained by Eshelby, Hirth and Lothe were used to derive the closed form crack tip singular stress fields. It was concluded that three elastic stiffness coefficients of diamond lattice structure have important role to control the crack tip singular stress fields, and maximum hoop stress for mixed mode proposed by Erdogan and Sih. © 2022 The Society of Materials Science, Japan.
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页码：879 / 886
页数：7
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