Synthesis of metastable or non-equilibrium phased oxides and their physical properties

被引：0
作者：
Kaneko K. [1 ]
Fujita S. [2 ]
机构：
[1] Engineering Education Research Center, Graduate School of Engineering, Kyoto University, Nishikyo-ku, Kyoto
[2] Photonics and Electronics Science and Engineering Center, Kyoto Univ., Nishikyo-ku, 615-8520, Kyoto
来源：
Zairyo/Journal of the Society of Materials Science, Japan | 2019年 / 68卷 / 10期
关键词：
Artificial mineral; Corundum; Metastable; Mist CVD; Non-equilibrium; Oxide;
D O I：
10.2472/jsms.68.733
中图分类号：
学科分类号：
摘要：
It has been a hard work to synthesize metastable or non-equilibrium compounds because they usually can be obtained under high temperatures and high pressures. However, mist CVD technique has potentials to develop new synthesis routes of them. Metastable or non-equilibrium oxides were fabricated under atmosphere or relatively lower temperatures of 500 ◦C. The key method is a choice of crystal structures of substrates. Crystal structures of thin films fabricated by mist CVD method are strongly influenced by the crystal structure of substrates, because their growth energies are relatively low. Mechanical stress from substrates strongly rock the crystal structures of thin films. 2019 The Society of Materials Science, Japan
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页码：733 / 738
页数：5
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