The effect of Si content on structural, mechanical and optical behaviour of magnetron sputtered Al–Si–N nanocomposite thin films

Magnetron sputtered Al–Si–N thin films with varying silicon content were developed by Al–Si target with different amount of silicon by weight % (0, 5, 10, 14, 20). The effect of increasing silicon content on structural, mechanical and optical behaviour was investigated. The phase analysis and crystallite size of the films were studied by X-Ray Diffraction. The changes in microstructure of the coatings were studied by scanning electron and transmission electron microscopes (SEM, TEM). Mechanical behaviour such as hardness, elastic modulus and creep were studied by nanoindentation. The optical transmittance spectra of Al–Si–N film system at varying silicon content were acquired by UV–Visible Spectrometer. The correlation between the microstructure, mechanical and optical properties of the coatings at varying silicon content was established. © 2020 Elsevier B.V.