Impact of Sn on the Ti/Ge solid-state reaction: Phase formation sequence, morphological and electrical properties

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作者：
Quintero, Andrea [1 ,2 ]
Gergaud, Patrice [1 ]
Hartmann, Jean-Michel [1 ]
Reboud, Vincent [1 ]
Cassan, Eric [2 ]
Rodriguez, Philippe [1 ]
机构：
[1] Univ. Grenoble Alpes, CEA, Leti, Grenoble,F-38000, France
[2] Centre de Nanosciences et de Nanotechnologies, CNRS, Univ. Paris-Sud, Université Paris-Saclay, C2N - Orsay, Cedex,91405, France
来源：
Microelectronic Engineering | 2022年 / 252卷
关键词：
Solid state reactions;
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