Theoretical model and error analysis of the planar two-dimensional time-grating displacement sensor

被引：0

作者：

Liu X. ^{[1
]}

Li J. ^{[1
]}

Peng K. ^{[1
]}

Wang H. ^{[1
]}

Pu H. ^{[1
]}

机构：

[1] Engineering Research Center of Mechanical Testing Technology and Equipment, Ministry of Education, Chongqing University of Technology, Chongqing

来源：

Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument | 2020年 / 41卷 / 12期

关键词：

Displacement sensor; Error characteristic; Planar two-dimensional displacement measurement; Signal decoupling; Time-grating;

D O I：

10.19650/j.cnki.cjsi.J2007083

中图分类号：

学科分类号：

摘要：

Proposes a planar two-dimensional displacement measurement method and develops a new type of planar two-dimensional time-grating displacement sensor. Firstly, a planar two-dimensional time-grating measurement model is established and a discrete electrode encoding array is used to achieve the encoding on the two-dimensional plane. Secondly, a decoupling method of measurement signals is proposed. Through linearly calculating the induced signals on the four orthogonally arranged moving ruler electrodes, the decoupling of the output traveling wave signal is realized, a three-dimensional electric field simulation model is established and the simulation analysis is carried out. The simulation results verify the feasibility of the discretized electrode encoding and decoupling calculation methods. In addition, the error characteristics of the planar two-dimensional time-grating displacement sensor are obtained through simulation, the error is mainly based on the fourth-order error and attenuates with the increase of the gap. Finally, a sensor prototype was manufactured using PCB technology and experiment was conducted. Experiments show that within the range of 300 mm×300 mm, the two-dimensional time-grating sensor has a large range error of ±8 μm in the X direction and a large range error of ±8. 4 μm in the Y direction, and reliable two-dimensional displacement measurement is realized. © 2020, Science Press. All right reserved.

引用

页码：111 / 121

页数：10

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