共 41 条
[1]
Monch L., Fowler J.W., Dauzere-Peres S., Mason S.J., Rose O., A survey of problems, solution techniques, and future challenges in scheduling semiconductor manufacturing operations, J. Sched, 14, pp. 583-599, (2011)
[2]
Susto G.A., Schirru A., Pampuri S., Pagano D., McLoone S., Beghi A., A predictive maintenance system for integral type faults based on support vector machines: An application to ion implantation, Proceedings of the 2013 IEEE International Conference on Automation Science and Engineering (CASE), pp. 195-200, (2013)
[3]
Paolanti M., Romeo L., Felicetti A., Mancini A., Frontoni E., Loncarski J., Machine learning approach for predictive maintenance in industry 4.0, Proceedings of the 2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications (MESA), (2018)
[4]
Susto G.A., Pampuri S., Schirru A., Beghi A., de Nicolao G., Multi-step virtual metrology for semiconductor manufacturing: A multilevel and regularization methods-based approach, Comput. Oper. Res, 53, pp. 328-337, (2015)
[5]
Romeo L., Loncarski J., Paolanti M., Bocchini G., Mancini A., Frontoni E., Machine learning-based design support system for the prediction of heterogeneous machine parameters in industry 4.0, Expert Syst. Appl, 140, (2020)
[6]
Romeo L., Paolanti M., Bocchini G., Loncarski J., Frontoni E., An Innovative Design Support System for Industry 4.0 Based on Machine Learning Approaches, Proceedings of the 2018 5th International Symposium on Environment-Friendly Energies and Applications (EFEA), pp. 1-6, (2018)
[7]
Susto G.A., Beghi A., de Luca C., A predictive maintenance system for epitaxy processes based on filtering and prediction techniques, IEEE Trans. Semicond. Manuf, 25, pp. 638-649, (2012)
[8]
Coleman C., Coleman C., Damodaran S., Chandramouli M., Deuel E., Making Maintenance Smarter: Predictive Maintenance and the Digital Supply Network, (2017)
[9]
Fraser K., Hvolby H.H., Watanabe C., A review of the three most popular maintenance systems: How well is the energy sector represented?, Int. J. Glob. Energy Issues, 35, pp. 287-309, (2011)
[10]
Chen F., Issues in the continuous improvement process for preventive maintenance: Observations from Honda, Nippondenso and Toyota, Prod. Inventory Manag. J, 38, pp. 13-16, (1997)