O2 plasma treated biosensor for enhancing detection sensitivity of sulfadiazine in a high- HfO2 coated silicon nanowire array

被引:0
|
作者
Zhang, Nan [1 ,2 ]
Zhang, Zhaohao [2 ,6 ]
Zhang, Qingzhu [2 ,3 ,4 ,5 ,6 ]
Wei, Qianhui [3 ,4 ]
Zhang, Jing [1 ]
Tang, Siqi [1 ,2 ]
Lv, Chunguang [1 ]
Wang, Yanrong [1 ]
Zhao, Hongbin [3 ,4 ]
Wei, Feng [3 ,4 ]
Yan, Jiang [1 ]
Baklanov, Mikhail [1 ]
Yin, Huaxiang [2 ,6 ,7 ]
Wang, Wenwu [2 ,6 ,7 ]
Tu, Hailing [3 ,4 ]
机构
[1] [1,Zhang, Nan
[2] 2,Zhang, Zhaohao
[3] 2,3,4,5,Zhang, Qingzhu
[4] 3,Wei, Qianhui
[5] Zhang, Jing
[6] 1,Tang, Siqi
[7] Lv, Chunguang
[8] Wang, Yanrong
[9] 3,Zhao, Hongbin
[10] 3,Wei, Feng
[11] Yan, Jiang
[12] Baklanov, Mikhail
[13] 2,6,Yin, Huaxiang
[14] 2,6,Wang, Wenwu
[15] 3,Tu, Hailing
来源
Zhang, Qingzhu (zhangqingzhu@ime.ac.cn) | 1600年 / Elsevier B.V., Netherlands卷 / 306期
基金
中国国家自然科学基金;
关键词
Hafnium oxides - Biosensors - Silica - Silicon - Silicon oxides - Contact angle - Low-k dielectric - Plasma applications;
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