Progress in 3D-printed micromachines

被引:0
作者
Maruo S.
机构
来源
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering | 2021年 / 87卷 / 09期
关键词
3D printing; Additive manufacturing; Microfluidic devices; Micromachines; Microtweezers; Optical trapping; Photopolymer; Stereolithography; Two-photon lithography;
D O I
10.2493/JJSPE.87.734
中图分类号
学科分类号
摘要
[No abstract available]
引用
收藏
页码:734 / 739
页数:5
相关论文
共 44 条
[1]  
(2013)
[2]  
(2009)
[3]  
(2005)
[4]  
Teh K.S., Additive direct-write microfabrication for MEMS: A review, Frontiers of Mechanical Engineering, 12, 4, (2017)
[5]  
Vaezi M., Seitz H., Yang S., A review on 3D micro-additive manufacturing technologies, The International Journal of Advanced Manufacturing Technology, 67, 5-8, (2013)
[6]  
Travitzky N., Bonet A., Dermeik B., Fey T., Filbert-Demut I., Schlier L., Schlordt T., Greil P., Additive manufacturing of ceramic-based materials, Advanced Engineering Materials, 16, 6, (2014)
[7]  
Hirt L., Reiser A., Spolenak R., Zambelli T., Additive manufacturing of metal structures at the micrometer scale, Advanced Materials, 29, 17, (2017)
[8]  
Tan L., Davis A.C., Cappelleri D.J., Smart polymers for microscale machines, Advanced Functional Materials, 31, 9, (2021)
[9]  
Vaezi M., Chianrabutra S., Mellor B., Yang S., Multiple material additive manufacturing-Part 1: a review: this review paper covers a decade of research on multiple material additive manufacturing technologies which can produce complex geometry parts with different materials, Virtual and Physical Prototyping, 8, 1, (2013)
[10]  
Yang L., Mayer F., Bunz U.H.F., Blasco E., Wegener M., Multimaterial multi-photon 3D laser micro- and nanoprinting, Light: Advanced Manufacturing, 2, (2021)