Decomposition of Greenhouse Gas of SF6 and CF4 by Means of At-mospheric Pressure Microwave Plasma Torch

被引：0
|
作者：
Li S. [1 ]
Xie S. [1 ]
Wu Y. [1 ]
Liao H. [1 ]
机构：
[1] Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Ministry of Education, Department of Physics, Dalian University of Technology, Dalian
来源：
Gaodianya Jishu/High Voltage Engineering | 2021年 / 47卷 / 08期
基金：
中国国家自然科学基金;
关键词：
Atmospheric pressure; Decom-position; Destruction and removal efficiency (DRE); Greenhouse gas; Microwave plasma; Perfluorocompounds (PFCs);
D O I：
10.13336/j.1003-6520.hve.20200665
中图分类号：
学科分类号：
摘要：
The emission of SF6 and CF4, two typical gases of the perfluorocompounds (PFCs), imposes great influence on global greenhouse effect in long term. The atmospheric-pressure microwave plasma torch (ATMPT) operating in a controllable stability can provide a plasma environment suitable for gas-phase chemical reaction. We studied the decomposition and conversion of SF6 and CF4 in ATMPT. The variation of destruction and removal efficiency (DRE) by measuring FTIR spectra is investigated with respect to the external control parameters, such as the microwave power, concentration, total gas flow, and the structure parameters of reaction chamber. The experimental results demonstrate that the DRE of SF6 and CF4 can approach 100% in some actual working conditions by increasing the microwave power and optimizing the structural parameters of reaction chamber and working conditions. So the emission of SF6 and CF4 can be controlled effectively by ATMPT in some actual working conditions, for example, the vehicle-mounted mobile processing equipment based on ATMPT is a possible solution for removing SF6 from emissions of power industry; moreover, in the pipeline terminal processing, ATMPT is shown as a promising technology for abating the exhaust gas, such as CF4 from semiconductor industry. © 2021, High Voltage Engineering Editorial Department of CEPRI. All right reserved.
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页码：3012 / 3019
页数：7
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