Collisional Sheath in the Electronegative Radio-Frequency Plasma

被引：0

作者：

甘宝霞

邓文隽

陈银华

机构：

[1] CASKeyLaboratoryofBasicPlasmaPhysics,DepartmentofModernPhysics,UniversityofScienceandTechnologyofChina,Hefei,China

来源：

Plasma Science and Technology | 2007年 / 9卷 / 04期

关键词：

D O I：

暂无

中图分类号：

O539 [等离子体物理的应用];

学科分类号：

070204 ;

摘要：

<正> A model of collisional RF sheath with negative ions is discussed in this paper.Theinfluences of collision and negative ions on the parameters of the sheath are studied throughnumerical simulation.It is found that when the collision coefficient increases and the RF power isfixed,the electrode potential and sheath electric field potential increase,the electrode current andthickness of the sheath decrease.When the negative ion content changes,the same phenomenonOccurs.

引用

页码：398 / 402

页数：5