Optimization of Langmuir Probe System Parameters in a Stationary Laboratory Plasma

<正> In order to obtain creditable data an applicable method to optimize parametersof the Langmuir probes and circuits in a stationary laboratory device is investigated and anexperimental criterion of the probe dimension is developed.To obtain the electron temperatureand density the Electron Energy Distribution Function (EEDF) approach with less computingtime and more accurate results is applied,instead of the conventional slope approach.Moreoverthe influence of the vessel wall materials on the plasma density is discussed briefly,indicating thatthe dielectric wall is helpful to enhancing the electron density.