High-sensitivity integrated devices based on surface plasmon resonance for sensing applications

A metallic nanostructured array that scatters radiation toward a thin metallic layer generates surface plasmon resonances for normally incident light. The location of the minimum of the spectral reflectivity serves to detect changes in the index of refraction of the medium under analysis. The normal incidence operation eases its integration with optical fibers. The geometry of the arrangement and the material selection are changed to optimize some performance parameters as sensitivity, figure of merit, field enhancement, and spectral width. This optimization takes into account the feasibility of the fabrication. The evaluated results of sensitivity（1020 nm/RIU）and figure of merit(614 RIU-1) are competitive with those previously reported.