Characterization of vanadyl phthalocyanine based surface-type capacitive humidity sensors附视频

被引：0

作者：

Fakhra Aziz ^{[1
,2
]}

MHSayyad ^{[1
]}

Khassan SKarimov ^{[1
,3
]}

MSaleem ^{[1
]}

Zubair Ahmad ^{[1
,4
]}

SMahmood Khan ^{[1
]}

机构：

[1] Ghulam Ishaq Khan Institute of Engineering Sciences and Technology,Topi-,Pakistan

[2] Low Dimensional Material Research Center,Department of Physics,University of Malaya, Kuala Lumpur,Malaysia

[3] Physical Technical Institute,Aini St-/,Dushanbe,,Tajikistan

[4] Department of Mechanical Engineering, Symonds Street Auckland,University of Auckland,New Zealand

来源：

半导体学报 | 2010年 / 11期

关键词：

surface-type; capacitance; vanadyl phthalocyanine; humidity sensor; organic semiconductor;

D O I：

暂无

中图分类号：

TP212.1 [物理传感器];

学科分类号：

080202 ;

摘要：

<正>This study presents the fabrication and characterization of novel surface-type capacitive humidity sensors using vanadyl phthalocyanine(VOPc) as the active material.The devices,which comprise three different thicknesses, have been fabricated using the thermal evaporation technique.A thin film of VOPc is deposited on thoroughly cleaned glass substrates with pre-patterned Ag electrodes.The capacitive effect of the samples under humidity has been investigated. Comparison of the samples with different thicknesses shows that the thinnest device seems more sensitive towards humidity.The humidity dependent capacitance properties of the sensor make it beneficial for use in commercial hygrometers.

引用

页码：9 / 14

页数：6

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