An advanced study of the response of ADF detector

被引：7
作者：
Grillo, V. [1 ]
机构：
[1] Ctr S3 NANO, I-41125 Modena, Italy
来源：
17TH INTERNATIONAL CONFERENCE ON MICROSCOPY OF SEMICONDUCTING MATERIALS 2011 | 2011年 / 326卷
关键词：
DARK-FIELD IMAGES; QUANTIFICATION;
D O I：
10.1088/1742-6596/326/1/012036
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
The detailed characteristics of the Annular Dark Field detector and acquisition system may play a strong role in quantitative analysis. This article discusses the role in high angle experiments of a non-uniform detection efficiency and of the saturation. The former can be neglected in most comparative experiment while the latter can produce hidden nonlinearities that reduce the reliability of quantitative analysis.
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页数：4
相关论文
共 7 条
[1]   Atomic-resolution quantitative composition analysis using scanning transmission electron microscopy Z-contrast experiments [J].
Carlino, E ;
Grillo, V .
PHYSICAL REVIEW B, 2005, 71 (23)
[2]  
Cullis A., 2007, IOP C P I PHYS
[3]   Influence of the static atomic displacement on atomic resolution Z-contrast imaging [J].
Grillo, V. ;
Carlino, E. ;
Glas, F. .
PHYSICAL REVIEW B, 2008, 77 (05)
[4]   Experimental quantification of annular dark-field images in scanning transmission electron microscopy [J].
LeBeau, James M. ;
Stemmer, Susanne .
ULTRAMICROSCOPY, 2008, 108 (12) :1653-1658
[5]  
Nellist PD, 2010, J PHYS C SERIES, V241
[6]   Measurement of specimen thickness and composition in AlxGa1-xN/GaN using high-angle annular dark field images [J].
Rosenauer, Andreas ;
Gries, Katharina ;
Mueller, Knut ;
Pretorius, Angelika ;
Schowalter, Marco ;
Avramescu, Adrian ;
Engl, Karl ;
Lutgen, Stephan .
ULTRAMICROSCOPY, 2009, 109 (09) :1171-1182
[7]  
Walther T, 1997, INST PHYS CONF SER, P303
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