The key role in the structure and properties of a novel CrNiTiMo high-entropy alloys films prepared by magnetron sputtering: Bias voltage

In this study, CrNiTiMo high-entropy alloys films were prepared on 304 stainless steel and silicon wafer substrates by direct current magnetron sputtering and the effects of bias voltages (0 to-200 V) on microstructure, chemical composition, hardness and corrosion resistance were investigated. The results showed that the surface of the CrNiTiMo HEAs films exhibited equiaxed nanoparticles and are composed of uniformly distributed Cr, Ni, Ti, and Mo elements. Meanwhile, the films developed a columnar structure and formed a biphasic structure with body-centered cubic solid solution and amorphous phases. The roughness decreased and then increased with increasing bias voltage, and the film deposited at-50 V had the lowest roughness (1.02 f 01 nm), which also had a maximum hardness of approximately 9.52 f 0.2 GPa and a maximum elastic modulus of approximately 187 f 6 GPa. In addition, all films showed better corrosion resistance compared to 304 stainless steel substrates at 3.5 wt% NaCl solution. The corrosion current density ( i corr ) of the films decreased and then increased with increasing bias voltages and reached the lowest i corr of about 2.49 x 10-- 8 A/cm 2 , indicating that the films deposited at a bias voltage of-50 V had the best corrosion resistance. These was attributed to the formation of the passivation films mainly composed of TiO2 2 and Cr2O3 2 O 3 and the improvement of the surface quality of the film as well as the refinement of the columnar structure and particles.