The effect of boron anomaly on the dielectric properties and thermal expansion of barium borosilicate glasses for 3D packaging systems

被引:1
作者
Liang, Tianpeng [1 ]
Liu, Yuan [1 ]
Zheng, Wei [1 ]
Fu, Haolun [2 ]
Zhang, Jihua [3 ]
Chen, Hongwei [3 ]
Gao, Libin [3 ]
Chen, Daming [4 ]
Li, Yuanxun [3 ]
机构
[1] Chengdu Univ Technol, Sch Mech & Elect Engn, Chengdu 610059, Sichuan, Peoples R China
[2] Southeast Univ, Sch Informat Sci & Engn, Nanjing 211189, Jiangsu, Peoples R China
[3] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Device, Chengdu 610054, Sichuan, Peoples R China
[4] Hainan Univ, State Key Lab Marine Resource Utilizat South, Hainan 570228, Peoples R China
关键词
Dielectric properties; Thermal expansion; 3D packaging; STRUCTURAL-CHANGES; SILICATE; CRYSTALLIZATION; INDENTATION; BEHAVIOR; OXIDES; MELTS;
D O I
10.1016/j.ceramint.2024.06.029
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Barium borosilicate (BBS) glass is a potential three-dimensional system packaging and sensor cover material. In this study, we prepared glass samples with different SiO2/B2O3 ratios based on the revised model of Dell and Bray and discussed the effect of boron anomaly on dielectric and thermal properties through Raman spectroscopy. The results indicate that the [BO4] tetrahedrons are beneficial in reducing the dielectric constant and dielectric loss to a certain extent, while the improvement in the coefficient of thermal expansion (CTE) is attributed to the depolymerization of the glass network by the [BO3] triangles. After the disappearance of the boron anomaly, a certain amount of dielectric performance is sacrificed in exchange for an increase in the CTE. When the substitution rate of B2O3 for SiO2 reaches 15.12 mol%, the CTE of the sample increases to 8.43 x 10(-6)/degrees C, in addition, the dielectric constant and dielectric loss decrease to 4.90 and 0.0071 (@1 GHz), respectively. In summary, this work provides a suitable method for preparing glass with a high coefficient of expansion and low dielectric loss to address the thermal mismatch effect of different materials in electronic packaging systems.
引用
收藏
页码:32217 / 32224
页数:8
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