Modulation of optical properties and defects of ZnO films with preferred orientations by annealing in different atmospheres

被引:0
作者
Guo, Qing [1 ,2 ]
Dai, Yuxiang [1 ,2 ]
Qi, Yang [1 ,2 ,3 ]
机构
[1] Northeastern Univ, Sch Mat Sci & Engn, Dept Mat Phys & Chem, Shenyang 110819, Liaoning, Peoples R China
[2] Northeastern Univ, State Key Lab Rolling & Automat, Shenyang 110819, Liaoning, Peoples R China
[3] Northeastern Univ, Key Lab Anisotropy & Texture Mat, Minist Educ, Shenyang 110819, Peoples R China
基金
中国国家自然科学基金;
关键词
ELECTRIC-FIELD; THIN-FILMS; EMISSION; RAMAN;
D O I
10.1063/5.0230292
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Nonpolar (100), polar (002), semipolar (101), and nonpolar (110) preferred oriented ZnO films were synthesized by regulated growth using the chemical bath deposition method. The crystallinity, surface morphology, and optical properties of ZnO films with different preferred orientations after annealing in different atmospheres were systematically investigated. The experimental results show an increase in crystallinity and a decrease in surface roughness of the films after annealing; in particular, the optical transmittance of semipolar (101) preferred oriented ZnO films was significantly higher than that of the other samples. XPS and PL spectra confirmed that annealing in argon effectively increased donor defects, whereas annealing in oxygen and ozone reduced donor defects in the films, and that ozone annealing was best suited to enhance acceptor defects in nonpolar (110) preferred oriented ZnO films. Argon annealing is the best for the enhancement of donor defects in polar (002) preferred oriented ZnO films. This work achieves modulation of optical properties and defects of ZnO films by annealing in different atmospheres, which provides new ideas for the application of ZnO materials.
引用
收藏
页数:11
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