Study on the facet effect in LEC-GaSb single crystals

被引:1
作者
Dong, Weimin [1 ]
Jianga, Jun [1 ]
Peng, Qianwen [1 ]
Liu, Chengao [1 ]
Chu, Deliang [1 ]
Duan, Biwen [1 ]
Feng, Henghao [1 ]
Yanga, Jin [1 ]
Guo, Wei [2 ]
Kong, Jincheng [1 ]
Zhao, Jun [1 ]
机构
[1] Kunming Inst Phys, Kunming 650223, Peoples R China
[2] Beijing Inst Technol, Sch Phys, Beijing 100081, Peoples R China
关键词
GROWTH;
D O I
10.1016/j.jcrysgro.2024.127706
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The " facet effect" " had an important impact on the growth and quality of III-V semiconductor crystals. Herein, Tedoped (11 1) ) and (100 ) GaSb single crystals were grown by the liquid-encapsulated Czochralski (LEC) method. The theoretical causes of the central facets of (111 ) GaSb and the edge facets of (1 00) ) GaSb were studied in detail. The Te component segregation, electrical parameter changes, infrared transmittance differences, and epitaxial film defects caused by the " facet effect" " were comprehensively analyzed. The influence of the shoulder angle on the edge facets of (100 ) GaSb and the size differences of edge facets between the Ga-face and Sb-face were studied.
引用
收藏
页数:6
相关论文
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