Enhanced high-frequency piezoelectric ultrasonic transducer based on integrated AlN honeycomb structure

Ultrasonic transducers are vital components for transmitting and receiving sound waves, which are customized to specific applications based on their operating frequencies.Small-sized high-frequency ultrasonic transducers have gained considerable attention and adoption in medical ultrasound imaging and small pipe flow testing. However, the significant impact of attenuation on high-frequency ultrasound restricts detection distance and degrades the signal-to-noise ratio. Additionally, thin-film high-frequency ultrasound transducers exhibit low output sound pressure, due to their low resonance displacement. In this study, we present an innovative approach to address these challenges through the design of an integrated small-size honeycomb-type top, two-electrode aluminum nitride (AIN)-based high-frequency ultrasonic transducer. A comprehensive investigation of the relationship between transducer size, sensitivity, and transmitted sound pressure levels is conducted. Leveraging microelectromechanical systems (MEMS) micro-nano-machining technology, we fabricate a 14 x 13 array with a unit diameter of 50 mu m, and a matching circuit is employed to enhance the transducer's amplitude. Experimental results demonstrate remarkable transmit sound pressure levels (SPL) exceeding 210 dB (re:1 mu Pa/V) at a distance of 2 cm, with a maximum transmit SPL of 233 dB, and the receive sensitivity surpasses - 175 dB (re:1 V/mu Pa) and, at the 5 MHz resonance, the sensitivity reaches - 143 dB (re:1 V/mu Pa). Moreover, the transmit and receive linearity values demonstrate 99% and 98%, respectively. Our findings highlight the significant potential of the proposed high-frequency ultrasonic transducer for a diverse range of applications.