Electron emission from HfC(100) single-crystal tip

被引:0
作者
Kusunoki, Toshiaki [1 ]
Arai, Noriaki [2 ]
机构
[1] Hitachi Ltd, Res & Dev Grp, 1-280 Higashi Koigakubo, koigakubo, Tokyo 1858601, Japan
[2] Hitachi High Tech Corp, Nanotechnol Solut Business Grp, 882 Ichige, Hitachinaka, Ibaraki 3128504, Japan
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2024年 / 42卷 / 04期
关键词
FIELD-EMISSION; ENERGY-DISTRIBUTION; ZIRCONIUM; CATHODE;
D O I
10.1116/6.0003632
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We investigated electron emission characteristics of a hafnium carbide [HfC(100)] single-crystal tip at various temperatures toward finding a candidate of the next generation of emitters for electron microscopes. The emission mode changed from cold-field emission (CFE) to low-temperature and high-temperature thermal-field emission and, finally, to extended Schottky emission. The energy width at full width of half maximum of the emitted electrons was 0.2 eV in the CFE mode at an angular current of 20 mu A/sr, and it showed good emission stability with current noise less than 3.5% in an electron gun of a scanning electron microscope (SEM). Spatial resolution of the SEM at an acceleration voltage of 0.5 kV improved 14% by using the HfC(100)-CFE tip instead of a conventional W(310)-CFE tip. High monochromaticity and stable electron emission of the HfC(100)-CFE tip are suitable for the next generation of emitters for ultrahigh-resolution field emission SEMs.
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页数:13
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