[1] Hainan Univ, Collaborat Innovat Ctr Ecol Civilizat, Sch Mech & Elect Engn, Haikou 570228, Peoples R China
[2] Dalian Univ Technol, State Key Lab High Performance Precis Mfg, Dalian 116024, Peoples R China
[3] Zhejiang Univ, Sch Mat Sci & Engn, State Key Lab Silicon & Adv Semicond Mat, Hangzhou 310027, Peoples R China