2D Computational Fluid Dynamics Simulation Analysis of the Assembly of Low-Temperature Cofired Ceramics/Low-Temperature Cofired Ceramics and Si/Si Sandwiches by Reactive Bonding

被引:0
作者
Yuile, Adam [1 ]
Schulz, Alexander [2 ]
Wiss, Erik [1 ]
Mueller, Jens [2 ]
Wiese, Steffen [1 ]
机构
[1] Saarland Univ, Chair Microintegrat & Reliabil, D-66123 Saarbrucken, Germany
[2] TU Ilmenau, Fac Elect & Comp Engn, Dept Elect Technol, D-98693 Ilmenau, Germany
关键词
computational fluid dynamics; low-temperature cofired ceramics; reactive multilayers; Si/Si; SOLDER; FILMS;
D O I
10.1002/adem.202302283
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Numerical computational fluid dynamics simulations have been performed on 2D sandwich models to compare the performance of low-temperature cofired ceramics (LTCC)/LTCC and Si/Si sandwiches used in reactive bonding. In the sandwich model layers of solder, silver and a reactive multilayer used to bond the substrates are modeled. Additional to this, the surrounding air environment is also modeled. For simulating the heat released by the multilayer system, a user-defined function in the form of a square wave is written for the heat source with a defined width, corresponding to the reaction width, and this propagates at a fixed speed. Two sandwiches, one with LTCC/LTCC, and the other with Si/Si, are simulated and their response analyzed in terms of the solidification/melting of the solder and their respective time-temperature histories. In this article, it is shown that numerical computational fluid dynamics simulations reveal that low-temperature cofired ceramics (LTCC)/LTCC assemblies experience significantly higher temperatures than Si/Si during reactive bonding, due to LTCC's lower thermal conductivity. This leads to prolonged solder melting, increased stresses, and potential bonding issues. In these findings, it is suggested that optimizing solder thickness and reactive multilayer system deposition could address these thermal challenges, which are difficult to measure experimentally.image (c) 2024 WILEY-VCH GmbH
引用
收藏
页数:6
相关论文
共 22 条
[1]   Reactive multilayers fabricated by vapor deposition: A critical review [J].
Adams, D. P. .
THIN SOLID FILMS, 2015, 576 :98-128
[2]   Influence of the crystal orientation on the electrical properties of AlN thin films on LTCC substrates [J].
Bittner, A. ;
Ababneh, A. ;
Seidel, H. ;
Schmid, U. .
APPLIED SURFACE SCIENCE, 2010, 257 (03) :1088-1091
[3]   Fabrication and characterization of reactive nanoscale multilayer systems for low-temperature bonding in microsystem technology [J].
Boettge, Bianca ;
Braeuer, Joerg ;
Wiemer, Maik ;
Petzold, Matthias ;
Bagdahn, Joerg ;
Gessner, Thomas .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2010, 20 (06)
[4]   A novel technique for MEMS packaging: Reactive bonding with integrated material systems [J].
Braeuer, J. ;
Besser, J. ;
Wiemer, M. ;
Gessner, T. .
SENSORS AND ACTUATORS A-PHYSICAL, 2012, 188 :212-219
[5]  
Braeuer J., 2011, 2011 16 INT SOLIDSTA
[6]  
Glaser M., 2023, ENG CHANGING WORLD P
[7]   Design aspects of microwave components with LTCC technique [J].
Jantunen, H ;
Kangasvieri, T ;
Vähäkangas, J ;
Leppävuori, S .
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2003, 23 (14) :2541-2548
[8]   Ni3Sn4-composed die bonded interface rapidly formed by ultrasonic-assisted soldering of Sn/Ni solder paste for high-temperature power device packaging [J].
Ji, Hongjun ;
Li, Minggang ;
Ma, Shu ;
Li, Mingyu .
MATERIALS & DESIGN, 2016, 108 :590-596
[9]   Rapid formation of intermetallic joints through ultrasonic-assisted die bonding with Sn-0.7Cu solder for high temperature packaging application [J].
Ji, Hongjun ;
Qiao, Yunfei ;
Li, Mingyu .
SCRIPTA MATERIALIA, 2016, 110 :19-23
[10]  
Liang S., 2020, 2020 IEEE 70 ELECT C