Modeling of Plasma Nitriding of Austenitic Stainless Steel through a Mask

In this work, 2D simulations of stainless steel nitriding through a mask were performed with two configurations: with and without lateral adsorption under the mask, depending on the strength of the mask adhesion. The stress-induced diffusion and trapping-detrapping process are included as the main mechanisms of nitrogen mass transport. The main focus is on the analysis of the swelling process, which affects the expansion of the material. The surface concentration profiles and topographical profiles along the surface are calculated and compared with experimentally registered ones taken from the literature, and they show a good agreement. This allows for estimation of the values of model parameters. Because nitriding processes takes place in vertical and horizontal directions, the anisotropic aspect of nitriding are analyzed. It is shown that the adherence of the mask significantly influences the topographical profile and the anisotropy of nitriding, because in the case of a weakly adhered mask, a lateral adsorption process takes place under the mask. The influence of swelling and anisotropy in the case of pattern nitriding in small dimensions is discussed.