A CMOS-compatible and cost-effective room temperature sensitive hydrogen sensor

Hydrogen has a promising future as a renewable energy for fossil fuels. Nevertheless, hydrogen leakage will induce a great risk of explosion. It becomes a crucial work to implement fast and safe hydrogen leakage detection. In the paper, we develop an optical Schottky junction hydrogen sensing chip operating at room temperature (298 K). The sensor has a response time of 4 sin a 2% H2 with Air atmosphere and a detection limit can be 10 ppm by detecting the inhibition of photocurrent induced by hydrogen. When the temperature rises, the sensor response time can reduce to 1 s at 340 K. Additionally, the sensors are CMOS-compatible and costeffective without a heat source or voltage-biased state. The properties of the sensor allow for rapid and largescale use of on-site monitoring to reduce the risk of hydrogen leakage.