A fast-switching and ultra low-loss snapback-free reverse-conducting SOI-LIGBT with Adjustable Carrier Technology

被引:1
作者
Tang, Chunping [1 ]
Duan, Baoxing [1 ]
Yang, Yintang [1 ]
机构
[1] Xidian Univ, Sch Microelect, Xian, Peoples R China
基金
中国国家自然科学基金;
关键词
Reverse-conduction SOI-LIGBT; Adjustable carrier technology; SIPOS; Turn-off loss; RESISTANCE; TRENCHES;
D O I
10.1016/j.mejo.2024.106358
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A snapback-free Reverse-Conduction Silicon On Insulator Lateral Insulate Gate Bipolar Transistor (RC SOILIGBT) with Adjustable Carrier Technology (ACT LIGBT) is proposed in this paper. ACT LIGBT adds SemiInsulating Polycrystalline Silicon (SIPOS) material on the extended gate dielectric, and introduces the potential of the surface SIPOS into the P-type drift region (P-Drift) through SiO2 trenches. ACT LIGBT generates the inversion layer of electrons in the P-Drift due to the linear potential distribution brought by the high resistance characteristic of SIPOS, resulting in the adjustment of the number of electrons and holes, and forming the technology of ACT. Additionally, ACT LIGBT adds a hole extraction path during it turned off. Meanwhile, compared to SSA LIGBT, ACT LIGBT optimized the BV (700V) by 34 %, while also optimizing the Von (1.69V) by 25 %, turn-off time (toff = 12ns) by 92 %, turn-off loss (Eoff = 0.69 mJ/cm2) by 79 %, and reverse recovery charge (Qrr = 32.98 mu C/cm2) by 32.5 %, ultimately achieving a better compromise relationship among BV, Von, toff, Eoff, and Qrr.
引用
收藏
页数:6
相关论文
共 24 条
  • [1] [Anonymous], 2017, Sentaurus Device User Guide
  • [2] Analysis of the Novel Snapback-Free LIGBT With Fast-Switching and Improved Latch-Up Immunity by TCAD Simulation
    Duan, Baoxing
    Sun, Licheng
    Yang, Yintang
    [J]. IEEE ELECTRON DEVICE LETTERS, 2019, 40 (01) : 63 - 66
  • [3] Gris H, 2002, CHEM VAPOR DEPOS, V8, P213, DOI 10.1002/1521-3862(20020903)8:5<213::AID-CVDE213>3.0.CO
  • [4] 2-8
  • [5] A fast switching segmented anode NPN controlled LIGBT
    Hardikar, S
    Tadikonda, R
    Sweet, M
    Vershinin, K
    Narayanan, EMS
    [J]. IEEE ELECTRON DEVICE LETTERS, 2003, 24 (11) : 701 - 703
  • [6] Hayashi H., 1979, 1979 INT EL DEV M, P522, DOI [10.1109/IEDM.1979.189673, DOI 10.1109/IEDM.1979.189673]
  • [7] A Novel Low Turn-Off Loss and Snapback-Free Reverse-Conducting SOI-LIGBT With Integrated Polysilicon Diodes
    Hu, Huan
    Kong, Moufu
    Wu, Jiayu
    Yi, Bo
    Chen, Xing Bi
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 2019, 66 (10) : 4296 - 4301
  • [8] A Novel Lateral Reverse Conducting Trench IGBT on SOI employing NPN bipolar with small area penalty and switching energy loss
    Liu, Suyang
    Zhang, Yue
    Zhang, Zijian
    Inuishi, Masahide
    [J]. 6TH IEEE ELECTRON DEVICES TECHNOLOGY AND MANUFACTURING CONFERENCE (EDTM 2022), 2022, : 204 - 206
  • [9] A Snapback-Free Fast-Switching SOI LIGBT With an Embedded Self-Biased n-MOS
    Luo, Xiao Rong
    Zhao, Zheyan
    Huang, Linhua
    Deng, Gaoqiang
    Wei, Jie
    Sun, Tao
    Zhang, Bo
    Li, Zhaoji
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 2018, 65 (08) : 3572 - 3576
  • [10] A Snapback-Free and Low-Loss Shorted-Anode SOI LIGBT With Self-Adaptive Resistance
    Luo, Xiaorong
    Yang, Yang
    Sun, Tao
    Wei, Jie
    Fan, Diao
    Ouyang, Dongfa
    Deng, Gaoqiang
    Yang, Yonghui
    Zhang, Bo
    Li, Zhaoji
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 2019, 66 (03) : 1390 - 1395