Guest Editorial Special section on the 2023 SEMI Advanced Semiconductor Manufacturing Conference

被引：1

作者：

Bickford, Jeanne Paulette ^{[1
]}

Cunff, Delphine Le ^{[2
]}

Buengener, Ralf ^{[3
]}

Radloff, Stefan ^{[4
]}

Werbaneth, Paul

机构：

[1] Global Foundries, Essex Jct, VT 05452 USA

[2] STMicroelect, F-38920 Crolles, France

[3] Intel Corp, Hillsboro, OR 97124 USA

[4] Intel Corp, Chandler, AZ 85226 USA

来源：

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | 2024年 / 37卷 / 03期

关键词：

Special issues and sections; Meetings; Semiconductor device manufacture;

D O I：

10.1109/TSM.2024.3429588

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：225 / 228

页数：4

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