Laser Embeds Nanoscale Device in Silicon

被引:0
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作者
Gent, Edd
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D O I
10.1109/MSPEC.2024.10669256
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
摘要
A team of engineers at Bilkent University, in Ankara, T & uuml;rkiye, has built a nanoscale optical element not on top of a silicon wafer, but rather in a layer below the surface. To achieve this, they used a special type of laser known as a Bessel beam, whose light can pass through the surface of a wafer and interact with the silicon below. Because the Bessel beam's light doesn't diffract, it's now possible to create two-dimensional structures inside the silicon as small as 100 nanometers.
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页码:14 / 15
页数:2
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