Sensing with extended gate negative capacitance ferroelectric field-effect transistors

被引:4
|
作者
Xue, Honglei [1 ]
Peng, Yue [2 ]
Jing, Qiushi [1 ]
Zhou, Jiuren [2 ]
Han, Genquan [2 ]
Fu, Wangyang [1 ]
机构
[1] Tsinghua Univ, Sch Mat Sci & Engn, Key Lab Adv Mat MOE, Beijing 100084, Peoples R China
[2] Xidian Univ, Sch Microelect, Xian 710071, Peoples R China
来源
CHIP | 2024年 / 3卷 / 01期
关键词
Extended gate; Ion-sensitive fi eld-effect transistors; Negative capacitance; Sub-60 mV/dec subthreshold swing; Ferroelec- tric memory effect; DATA RETENTION; OXIDE; MEMORY; FILMS;
D O I
10.1016/j.chip.2023.100074
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
With major signal analytical elements situated away from the measurement environment, extended gate (EG) ion-sensitive fi eld- effect transistors (ISFETs) offer prospects for whole chip circuit design and system integration of chemical sensors. In this work, a highly sensitive and power-ef fi cient ISFET was proposed based on a metal - ferroelectric - insulator gate stack with negative capacitance - induced super-steep subthreshold swing and ferroelectric memory function. Along with a remotely connected EG electrode, the architecture facilitates diverse sensing functions for future establishment of smart biochemical sensor platforms.
引用
收藏
页数:6
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