Electro-Thermal Simulation and Evaluation of Transition Edge Sensor X-ray Microcalorimeter with Mushroom-Type Absorber

High-efficiency microcalorimeter arrays are required as imaging spectroscopy for X-ray microscopy in general and for astrophysics. We have developed in-house an array of Transition Edge Sensor (TES) X-ray microcalorimeters with mushroom-type absorbers which have a large area of 260 mu m\documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$$260\,\upmu \hbox {m}$$\end{document} square with multiple support stems. Insufficient thermal conductivity may degrade the energy resolution. We construct a 3D FEM simulation with thermal conduction and electric feedback circuit of TES. Estimated physical parameters were incorporated into the simulation to reproduce the measured pulse waveforms. As a result, the effect of the large absorber on the degradation of energy resolution was small for the mushroom-type absorber TES calorimeter.