The effect of h-BN content on mechanical properties, microstructure and machinability of hot-pressed h-BN/Si3N4 composites

被引:0
作者
Wu, Song [1 ,2 ]
Xia, Yongfeng [1 ]
Zhu, Ming [1 ]
Zhao, Jun [3 ]
Yao, Dongxu [1 ]
Zeng, Yu-Ping [1 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Performance Ceram & Superfine M, Shanghai 200050, Peoples R China
[2] Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
[3] Chinese Acad Sci, Shanghai Inst Ceram, Beijing, Peoples R China
关键词
h-BN; Machinability; Hot-pressing; Mechanical properties; SILICON-NITRIDE; CERAMICS; STRENGTH; HBN;
D O I
10.1016/j.ceramint.2024.05.342
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Si3N4 ceramics now face new applications and challenges in the semiconductor field. The preparation of h-BN/ Si3N4 machinable ceramics incorporating 5-30 vol% h-BN via hot-pressing was carried out. This study systematically explored how the varying h-BN content influenced the composite's microstructure, mechanical attributes, and machinability. The results showed that some of the h-BN was encapsulated by growing Si3N4 grains to form an intragranular structure during the process of hot-pressing, while the remaining h-BN exhibited uniform distribution along grain boundaries. The Si3N4 phase transition in composites was inhibited by excessive hBN, accompanied by a higher decrease in densification. The sample containing 20 vol% h-BN exhibited the best comprehensive performance, with high mechanical strength and excellent machinability. The bending strength and fracture toughness remained high at 862 MPa and 10.3 MPa m1/2, and could be effortlessly machined with cemented carbide drills. Additionally, the machinability of the composites was systematically characterized through observations of crack propagation paths, fitting of R-curves, and mechanical drilling tests.
引用
收藏
页码:30445 / 30452
页数:8
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