PAMBE growth of (1 1 (2)over-bar 2)-oriented GaN/AlN nanostructures on m-sapphire

被引:4
|
作者
Lahourcade, L. [1 ]
Renard, J. [1 ]
Kandaswamy, P. K. [1 ]
Gayral, B. [1 ]
Chauvat, M. P. [2 ]
Ruterana, P. [2 ]
Monroy, E. [1 ]
机构
[1] INAC SP2M NPSC, CEA Grenoble, CEA CNRS Grp Nanophys & Semicond, Grenoble 9, France
[2] CNRS ENSICAEN CEA UCBN, UMR 6252, CIMAP, F-14050 Caen, France
关键词
PAMBE; GaN; Semipolar; Quantum wells; Quantum dots; QUANTUM-WELLS;
D O I
10.1016/j.mejo.2008.07.067
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report on the plasma-assisted molecular-beam epitaxial growth of (11 (2) over bar 2)-oriented GaN/AlN nanostructures on (1 (1) over bar 0 0) m-plane sapphire. Moderate N-rich conditions enable to synthesize AlN(1 1 (2) over bar 2) directly on m-sapphire, with in-plane epitaxial relationships [1 1 (2) over bar (3) over bar](AlN)parallel to[0 0 1 1](sapphire) and [1 (1) over bar 0 0](AlN)parallel to[1 1 (2) over bar 0](sapphire). In the case of GaN, a Ga-excess of one monolayer is necessary to achieve two-dimensional growth of GaN(1122). Applying these growth conditions, we demonstrate the synthesis of (1 1 (2) over bar 2)-oriented GaN/AlN quantum well structures, showing a strong reduction of the internal electric field. By interrupting the growth under vacuum after the deposition of few monolayers of GaN under slightly Ga-rich conditions, we also demonstrate the feasibility of quantum dot structures with this orientation. (C) 2008 Elsevier Ltd. All rights reserved.
引用
收藏
页码:325 / 327
页数:3
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