[1] Anhui Univ, Sch Integrated Circuits, Key Lab Intelligent Comp & Signal Proc, Minist Educ, Hefei 230601, Peoples R China
[2] Chinese Acad Sci, Inst Microelect, Key Lab Fabricat Technol Integrated Circuits, Beijing 100029, Peoples R China
[3] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
[4] JFS Lab, Wuhan 430206, Hubei, Peoples R China
[5] Dalian Univ Technol, State Key Lab High Performance Precis Mfg, Dalian 116024, Peoples R China
[6] Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian 116024, Peoples R China
[7] Huadong Photoelectron IC Inst, Bengbu 233030, Anhui, Peoples R China
[8] Arizona State Univ, Sch Engn Matter Transport & Energy, Tempe, AZ 85287 USA
[9] Fudan Univ, Frontier Inst Chip & Syst, Zhangjiang Fudan Int Innovat Ctr, State Key Lab Integrated Chips & Syst, Shanghai 200433, Peoples R China