Characteristics of an ion beam in the figuring process on an optical ultra-low expansion glass surface

被引：1

作者：

Wu, Hsing-yu ^{[1
,2
,3
]}

Shen, Li-siang ^{[1
]}

Huang, Shao-rong ^{[2
,4
]}

Lin, Wen-wei ^{[5
]}

Hsiao, Li-jen ^{[6
]}

Cheng, Ching-ling ^{[4
]}

Yu, Guo-yu ^{[7
]}

Sun, Yung-shin ^{[8
]}

Hsu, Jin-cherng ^{[2
,8
,9
]}

机构：

[1] Taiwan Space Agcy, Hsinchu, Taiwan

[2] Natl Cent Univ, Ctr Astron Phys & Engn, Dept Opt & Photon, Taoyuan City 320317, Taiwan

[3] Natl Taipei Univ Technol, Dept Electroopt Engn, Taipei 10608, Taiwan

[4] Diopter Precis Taiwan Co Ltd, Taoyuan City 324, Taiwan

[5] Link Wave Aerosp Technol Inc, Hsinchu, Taiwan

[6] Natl United Univ, Dept Elect Engn, Miaoli 36063, Taiwan

[7] Univ Huddersfield, Sch Comp & Engn, Dept Engn & Technol, Huddersfield HD1 3DH, England

[8] Fu Jen Catholic Univ, Dept Phys, New Taipei City 242062, Taiwan

[9] Fu Jen Catholic Univ, Grad Inst Appl Sci & Engn, New Taipei City 242062, Taiwan

来源：

APPLIED OPTICS | 2024年 / 63卷 / 25期

关键词：

SYSTEM; ROUGHNESS; ENERGY;

D O I：

10.1364/AO.530314

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In this study, an ion source figured out the surface of a glass-ceramic material with an ultra-low thermal expansion coefficient for space optical elements. The investigation of the single-point, line, and square figuring patterns assessed the detailed characteristics of the ion beam. At a fixed ion beam current and processing time, a beam voltage of 600 V led to the greatest removal depth with the narrowest full width at half-maximum (FWHM). The surface roughness under different beam voltages was also examined and discussed. Line figuring with an ion beam voltage of 600 V and a one-dimensional sample moving speed of 0.25 mm/s exhibited a maximum depth removal rate of 19.71 nm/min after being polished 15 times. Two-dimensional square figuring was performed to polish a plane mirror with a diameter of 60 mm, and it successfully reduced its surface's peak-to-valley value to 18 nm due to the melting heat phenomenon of the glass-ceramic material in ion beam figuring (IBF). (c) 2024 Optica Publishing Group. All rights, including for text and data mining (TDM), Artificial Intelligence (AI) training, and similar technologies, are reserved.

引用

页码：6567 / 6575

页数：9