Numerical analysis of X-ray multilayer Fresnel zone plates with high aspect ratios

被引：0

作者：

Zhang, Lingyun ^{[1
,2
]}

Gao, Yazeng ^{[1
,2
]}

Ming, Shuaiqiang ^{[1
]}

Lu, Weier ^{[1
,2
,3
]}

Xia, Yang ^{[1
,2
,4
,5
]}

机构：

[1] Chinese Acad Sci, Inst Microelect, Beijing, Peoples R China

[2] Univ Chinese Acad Sci, Beijing, Peoples R China

[3] Chinese Acad Sci, Key Lab Sci & Technol Silicon Devices, Beijing, Peoples R China

[4] Univ Sci & Technol China, Hefei, Peoples R China

[5] Univ Sci & Technol China, Suzhou Inst Adv Res, Suzhou, Peoples R China

来源：

LASER AND PARTICLE BEAMS | 2024年 / 42卷

关键词：

atomic layer deposition; coupled wave theory; diffraction efficiency; high aspect ratio; multilayer Fresnel zones plates; numerical analysis; X-ray optics; DIFFERENCE TIME-DOMAIN; ATOMIC LAYER DEPOSITION; FABRICATION;

D O I：

10.1017/lpb.2024.3

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A partition calculation method (PCM) for calculating the diffraction efficiency of multilayer Fresnel zone plate with high aspect ratio is proposed. In contrast to the traditional theory, PCM designs and evaluates Fresnel zone plate (FZP) considering material pairs, all zone widths, thicknesses and X-ray energy more completely. The results obtained through PCM are validated by comparing them with the complex amplitude superposition theory and coupled wave theory numerical results. The PCM satisfies the requirements of the theoretical investigation of FZP with small outermost zone width (drN) and large thickness (t). Combining proper numerical analysis with the experimental conditions will present a great potential to break through the imaging performance of X-ray microscopy.

引用

页数：6

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