Twenty-nine million intrinsic Q-factor monolithic microresonators on thin-film lithium niobate

被引：18

作者：

Zhu, Xinrui ^{[1
]}

Hu, Yaowen ^{[1
,2
,3
]}

Lu, Shengyuan ^{[1
]}

Warner, Hana K. ^{[1
]}

Li, Xudong ^{[1
]}

Song, Yunxiang ^{[1
]}

Magalhaes, Leticia ^{[1
]}

Shams-Ansari, Amirhassan ^{[1
,4
]}

Cordaro, Andrea ^{[1
]}

Sinclair, Neil ^{[1
]}

Loncar, Marko ^{[1
]}

机构：

[1] Harvard Univ, John A Paulson Sch Engn & Appl Sci, Cambridge, MA 02138 USA

[2] Peking Univ, Sch Phys, State Key Lab Mesoscop Phys, Beijing 100871, Peoples R China

[3] Peking Univ, Frontiers Sci Ctr Nanooptoelectron, Sch Phys, Beijing 100871, Peoples R China

[4] DRS Daylight Solut, San Diego, CA 92127 USA

来源：

PHOTONICS RESEARCH | 2024年 / 12卷 / 08期

基金：

美国国家航空航天局; 美国国家卫生研究院; 美国国家科学基金会; 新加坡国家研究基金会;

关键词：

PHOTONICS; RESONATOR;

D O I：

10.1364/PRJ.521172

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The recent emergence of thin-film lithium niobate (TFLN) has extended the landscape of integrated photonics. This has been enabled by the commercialization of TFLN wafers and advanced nanofabrication of TFLN such as high-quality dry etching. However, fabrication imperfections still limit the propagation loss to a few dB/m, restricting the impact of this platform. Here, we demonstrate TFLN microresonators with a record-high intrinsic quality (Q) Q ) factor of twenty-nine million, corresponding to an ultra-low propagation loss of 1.3 dB/m. We present spectral analysis and the statistical distribution of Q factors across different resonator geometries. Our work pushes the fabrication limits of TFLN photonics to achieve a Q factor within 1 order of magnitude of the material limit. (c) 2024 Chinese Laser Press

引用

页码：A63 / A68

页数：6

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