Design and Fabrication of High-Quality Two-Dimensional Silicon-Based Photonic Crystal Optical Cavity with Integrated Waveguides

被引：3

作者：

Muhammad, Sohail ^{[1
]}

Chen, Dingwei ^{[1
]}

Xian, Chengwei ^{[1
]}

Zhou, Jun ^{[2
]}

Lei, Zhongke ^{[2
]}

Kuang, Pengju ^{[1
]}

Li, Zhe ^{[3
]}

Wen, Guangjun ^{[1
]}

Huang, Yongjun ^{[1
]}

机构：

[1] Univ Elect Sci & Technol China, Sichuan Prov Engn Res Ctr Commun Technol Intellige, Sch Informat & Commun Engn, Chengdu 611731, Peoples R China

[2] Sichuan Guoruan Technol Grp Co Ltd, Chengdu 610031, Peoples R China

[3] Univ Elect Sci & Technol China, Sch Automat Engn, Chengdu 611731, Peoples R China

来源：

PHOTONICS | 2024年 / 11卷 / 08期

基金：

中国国家自然科学基金; 中国博士后科学基金;

关键词：

two-dimensional high-Q optical cavity; PhC waveguides; silicon-based integrated PhC cavity; SLOW LIGHT; SLAB;

D O I：

10.3390/photonics11080753

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The emergences of silicon-based photonic crystal (PhC) waveguides and two-dimensional (2D) PhC line-defect optical cavities have revolutionized the field of integrated photonics. In this paper, we design and fabricate a high-quality (high-Q) 2D silicon-based PhC optical cavity with integrated waveguides. We employ the 2D finite-difference time-domain (FDTD) method to simulate the cavity, considering two different thicknesses: 0.5 mu m and 0.25 mu m. By optimizing the line-defect and air-slot widths for the integrated PhC waveguides, we are able to achieve remarkable Q-factors for the PhC optical cavity. With a silicon thickness of 0.5 mu m, the high-Q achieves an impressively high value of 8.01 x 106, while at a silicon thickness of 0.25 mu m, it achieves 1.91 x 107. This research highlights the importance of design optimization and fabrication techniques in achieving high-Q optical devices using PhC and silicon-based structures.

引用

页数：15

共 52 条

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