Double-Sided Bonding Process Enables X-ray Flat Panel Detectors

被引:0
作者
Zhang, Hui [1 ,2 ]
Tie, Shujie [3 ]
Ye, Jiajiu [1 ]
Wang, Zihan [1 ,2 ]
Wan, Changmao [1 ,2 ]
Xu, Shendong [1 ]
Tao, Yuli [1 ,2 ]
Liang, Zheng [1 ,2 ]
Xu, Huifen [1 ,2 ]
Li, Jinfeng [4 ]
Zheng, Xiaojia [3 ]
Pan, Xu [1 ]
机构
[1] Chinese Acad Sci, Hefei Inst Phys Sci, Inst Solid State Phys, Hefei 230031, Peoples R China
[2] Univ Sci & Technol China, Hefei 230026, Peoples R China
[3] China Acad Engn Phys, Inst Chem Mat, Sichuan Res Ctr New Mat, Chengdu 610200, Sichuan, Peoples R China
[4] Chinese Peoples Liberat Army Acad Mil Sci, Inst Syst Engn, Beijing 100141, Peoples R China
基金
中国国家自然科学基金; 国家重点研发计划;
关键词
double-sided bonding (DSB); large-size wafer; X-ray detectors; delta-CsPbI3; ultralowdetection limit; FILMS;
D O I
10.1021/acsami.4c06863
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Metal halide perovskites have demonstrated superior sensitivity, lower detection limits, stability, and exceptional photoelectric properties in comparison to existing commercially available X-ray detector materials, showing their potential for shaping the next generation of X-ray detectors. Nevertheless, significant challenges persist in the seamless integration of these materials into pixelated array sensors for large-area X-ray direct detection imaging. In this article, we propose a strategy for fabricating large-scale array devices using a double-sided bonding process. The approach involves depositing a wet film on the surface of a thin-film transistor substrate to establish a robust bond between the substrate and delta-CsPbI3 wafer via van der Waals force, thereby facilitating area-array imaging. Additionally, the freestanding polycrystalline delta-CsPbI3 wafer demonstrated a competitive ultralow detection limit of 3.46 nGy(air) s(-1) under 50 kV(P) X-ray irradiation, and the delta-CsPbI3 wafer still maintains a stable signal output (signal current drift is 3.5 x 10(-5) pA cm(-1) s(-1) V-1) under the accumulated radiation dose of 234.9 mGy(air). This strategy provides a novel perspective for the industrial production of large-area X-ray flat panel detectors utilizing perovskites and their derivatives.
引用
收藏
页码:38252 / 38259
页数:8
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