Indirect Enhancement of ALD Thin-Film Properties Induced by the ECAP Modification of an As-Extruded Mg-Ca Alloy

被引：1

作者：

Lin, Pi-Chen ^{[1
]}

Li, Jun-Yu ^{[1
]}

Chen, Hou-Jen ^{[1
]}

Lin, Kaifan ^{[1
]}

Chen, Miin-Jang ^{[1
]}

Lin, Kun-Ming ^{[2
]}

Lin, Hsin-Chih ^{[1
]}

机构：

[1] Natl Taiwan Univ, Dept Mat Sci & Engn, Taipei 106319, Taiwan

[2] Feng Chia Univ, Dept Mat Sci & Engn, Taichung 407301, Taiwan

来源：

MICROMACHINES | 2024年 / 15卷 / 08期

关键词：

atomic layer deposition; equal-channel angular pressing; indirect film improvement; corrosion protection; magnesium-calcium alloy; ATOMIC LAYER DEPOSITION; BIODEGRADABLE MAGNESIUM ALLOYS; CORROSION-RESISTANCE; IMPEDANCE SPECTROSCOPY; BEHAVIOR; ZRO2; MICROSTRUCTURE; REACTIVITY; EVOLUTION; TIO2;

D O I：

10.3390/mi15081006

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The purpose of this study is to investigate the indirect effects on the properties of ZrO2 films deposited by atomic layer deposition (ALD) when an Mg-Ca alloy is modified through equal-channel angular pressing (ECAP) following extrusion. The study aims to understand how the increase in CaO content in the native oxide layer of the Mg-Ca alloy influences the crystallinity and defect density of the ZrO2 film. Consequently, the corrosion protection performance of the ZrO2 film is enhanced by 1.2 to 1.5 times. A reduction in the anti-scratch property of the ZrO2 film was also observed, with a critical load reduction of 34 mu N. This research provides a detailed analysis of the modifications induced by ECAP on the as-extruded Mg-Ca alloy and its subsequent impact on the properties of the ZrO2 film.

引用

页数：17

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