Multilayer Ge8Sb92/Ge2Sb2Te5 thin films: unveiling distinct resistance states and enhanced performance for phase change random access memory

被引:0
|
作者
Liu, Liu [1 ]
Li, Anding [1 ]
Chen, Yukun [1 ]
Liu, Ruirui [1 ]
Xu, Jiayue [1 ]
Zhai, Jiwei [2 ]
Song, Zhitang [3 ]
Song, Sannian [3 ]
机构
[1] Shanghai Inst Technol, Sch Mat Sci & Engn, Shanghai 201418, Peoples R China
[2] Tongji Univ, Sch Mat Sci & Engn, Shanghai Key Lab R&D & Applicat Met Funct Mat, Shanghai 201804, Peoples R China
[3] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China
基金
中国国家自然科学基金;
关键词
phase change random access memory; multiple thin films; high storage density; fast phase-change speed; high thermal stability; CRYSTALLIZATION;
D O I
10.1088/1361-6463/ad6a25
中图分类号
O59 [应用物理学];
学科分类号
摘要
This study investigates the phase-change properties of [Ge8Sb92 (25 nm)-Ge2Sb2Te5 (25 nm)](1) multilayer thin films, elucidating three distinct resistance states originating from two structural transitions: initial Sb precipitation and Ge2Sb2Te5-FCC crystallization, followed by Ge2Sb2Te5-FCC to Ge2Sb2Te5-HEX transformation with additional Sb precipitation. The phase transitions induce two abrupt changes in resistance at temperatures of 169.8 degrees C and 197.7 degrees C, respectively, with corresponding data retention temperatures of 97 degrees C and 129 degrees C, indicating robust thermal stability. The [Ge8Sb92 (25 nm)-Ge2Sb2Te5 (25 nm)](1)-based phase change random access memory (PCRAM) device demonstrates reversible switching characteristics and multi-level storage capabilities within 20 ns, showcasing enhanced phase-change speed and storage density. In summary, [Ge8Sb92(25 nm)-Ge2Sb2Te5(25 nm)](1) demonstrates enhanced thermal stability, swift phase transition, and increased storage density relative to conventional Ge2Sb2Te5, establishing it as a promising new phase-change material for PCRAM applications.
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页数:7
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