Enhanced emitting aperture in optical phased arrays with weak-coupled grating antennas via large critical dimensions

被引：1

作者：

Tang, Gelin ^{[1
]}

Xu, Sumei ^{[1
]}

Zhao, Xingyan ^{[1
]}

Qiu, Yang ^{[1
]}

Zheng, Shaonan ^{[1
]}

Dong, Yuan ^{[1
]}

Zhong, Qize ^{[1
]}

Hu, Ting ^{[1
]}

机构：

[1] Shanghai Univ, Sch Microelect, Shanghai 201800, Peoples R China

来源：

APPLIED OPTICS | 2024年 / 63卷 / 21期

基金：

中国国家自然科学基金;

关键词：

D O I：

10.1364/AO.527439

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We propose what we believe to be a novel strategy to design optical phased arrays (OPAs) antennas by inserting a narrow waveguide between the bus waveguide and grating teeth. When the minimum critical dimension (CD) is 200 nm and the grating length is 1.5 mm, we achieve a quite small divergence angle of 0.05 degrees , a reduction from 0.11 degrees using the conventional method with the same CD. This design is compatible with 248 nm deep ultraviolet lithography, offering a more accessible fabrication process. By the gap's increase from 180 nm to 410 nm rather than minimizing grating tooth dimensions, the divergence angles ( delta theta ) have been demonstrated to be reduced from 0.28 degrees to 0.05 degrees . Furthermore, the designed OPA exhibits well divergence angles consistency, with a low standard deviation of 0.35% across wavelengths ranging from 1500 nm to 1560 nm. This innovation simplifies OPA fabrication, paving the way for cost-effective, high-resolution light detection and ranging (LiDAR) systems with extended detection capabilities. (c) 2024 Optica Publishing Group

引用

页码：5556 / 5561

页数：6