Complex oxide thin films: A review on pulsed laser epitaxy growth

被引:5
作者
Kim, Yunzyne [1 ]
Choi, Yeongju [2 ]
Lee, Sang A. [3 ]
Choi, Woo Seok [2 ]
Kang, Kyeong Tae [1 ]
机构
[1] Kyungpook Natl Univ, Dept Phys, KNU G LAMP Project Grp, Daegu 41566, South Korea
[2] Sungkyunkwan Univ, Dept Phys, Suwon 16419, South Korea
[3] Pukyong Natl Univ, Dept Phys, Busan 48513, South Korea
基金
新加坡国家研究基金会;
关键词
Pulsed laser epitaxy; Complex oxide thin film; Deposition; Single crystal; Heterostructure; GAS-PHASE OXIDATION; STRAIN RELAXATION; DEPOSITION; TEMPERATURE; STABILITY; ABLATION; YBA2CU3O7-DELTA; INTERFACES; MORPHOLOGY; PRESSURE;
D O I
10.1016/j.cap.2024.09.001
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Pulsed laser epitaxy (PLE) has emerged as a pivotal technique in the fabrication of complex oxide thin films, offering unprecedented control over material composition and myriads of properties. Complex oxides exhibit various functionalities, such as high-Tc superconductivity, colossal magnetoresistance, and ferroelectricity, making them essential for advanced electromagnetic and optical applications. PLE facilitates the epitaxial growth of complex oxides using a high-power pulsed laser to ablate a solid target, generating a plume of material that is deposited onto a heated substrate. The process is highly adaptable and capable of achieving stoichiometric material in thin film form with high quality. This review explores the fundamental principles, system configurations, and essential growth parameters of PLE and highlights its role in advancing the field of complex oxide thin films.
引用
收藏
页码:113 / 130
页数:18
相关论文
共 88 条
  • [61] GAS-PHASE OXIDATION OF COPPER DURING LASER ABLATION OF YBA2CU3O7-DELTA IN DIFFERENT OXIDIZING AMBIENTS
    OTIS, CE
    GUPTA, A
    BRAREN, B
    [J]. APPLIED PHYSICS LETTERS, 1993, 62 (01) : 102 - 104
  • [62] CALCULATION OF CRITICAL LAYER THICKNESS VERSUS LATTICE MISMATCH FOR GEXSI1-X/SI STRAINED-LAYER HETEROSTRUCTURES
    PEOPLE, R
    BEAN, JC
    [J]. APPLIED PHYSICS LETTERS, 1985, 47 (03) : 322 - 324
  • [63] Tunable electron scattering mechanism in plasmonic SrMoO3 thin films
    Prasetiyawati, Rahma Dhani
    Jeong, Seung Gyo
    Park, Chan-Koo
    Song, Sehwan
    Park, Sungkyun
    Park, Tuson
    Choi, Woo Seok
    [J]. CURRENT APPLIED PHYSICS, 2023, 53 : 110 - 117
  • [64] Dielectric properties of SrTiO3 thin film prepared in a mixture of 18O2 and 16O2 gas
    Prijamboedi, B.
    Takashima, H.
    Wang, R.
    Shoji, A.
    Itoh, M.
    [J]. JOURNAL OF ALLOYS AND COMPOUNDS, 2008, 449 (1-2) : 48 - 51
  • [65] Plume propagation dynamics of complex oxides in oxygen
    Sambri, A.
    Amoruso, S.
    Wang, X.
    Granozio, F. Miletto
    Bruzzese, R.
    [J]. JOURNAL OF APPLIED PHYSICS, 2008, 104 (05)
  • [66] STEP MOTION ON CRYSTAL SURFACES
    SCHWOEBEL, RL
    SHIPSEY, EJ
    [J]. JOURNAL OF APPLIED PHYSICS, 1966, 37 (10) : 3682 - +
  • [67] Crystalline symmetry-dependent magnon formation in the itinerant ferromagnet SrRuO3
    Seo, Hyun Il
    Woo, Sungmin
    Kim, Jihyun
    Jeong, Seung Gyo
    Park, Tuson
    Choi, Woo Seok
    [J]. PHYSICAL REVIEW B, 2021, 103 (04)
  • [68] Optical investigation of oxygen defect states in SrTiO3 epitaxial thin films
    Seo, Il Wan
    Lee, Y. S.
    Lee, Sang A.
    Choi, Woo Seok
    [J]. CURRENT APPLIED PHYSICS, 2017, 17 (08) : 1148 - 1151
  • [69] Ferromagnetism above room temperature in bulk and transparent thin films of Mn-doped ZnO
    Sharma, P
    Gupta, A
    Rao, KV
    Owens, FJ
    Sharma, R
    Ahuja, R
    Guillen, JMO
    Johansson, B
    Gehring, GA
    [J]. NATURE MATERIALS, 2003, 2 (10) : 673 - 677
  • [70] Interface-engineered ferroelectricity of epitaxial Hf0.5Zr0.5O2 thin films
    Shi, Shu
    Xi, Haolong
    Cao, Tengfei
    Lin, Weinan
    Liu, Zhongran
    Niu, Jiangzhen
    Lan, Da
    Zhou, Chenghang
    Cao, Jing
    Su, Hanxin
    Zhao, Tieyang
    Yang, Ping
    Zhu, Yao
    Yan, Xiaobing
    Tsymbal, Evgeny Y.
    Tian, He
    Chen, Jingsheng
    [J]. NATURE COMMUNICATIONS, 2023, 14 (01)