Complex oxide thin films: A review on pulsed laser epitaxy growth

被引:5
作者
Kim, Yunzyne [1 ]
Choi, Yeongju [2 ]
Lee, Sang A. [3 ]
Choi, Woo Seok [2 ]
Kang, Kyeong Tae [1 ]
机构
[1] Kyungpook Natl Univ, Dept Phys, KNU G LAMP Project Grp, Daegu 41566, South Korea
[2] Sungkyunkwan Univ, Dept Phys, Suwon 16419, South Korea
[3] Pukyong Natl Univ, Dept Phys, Busan 48513, South Korea
基金
新加坡国家研究基金会;
关键词
Pulsed laser epitaxy; Complex oxide thin film; Deposition; Single crystal; Heterostructure; GAS-PHASE OXIDATION; STRAIN RELAXATION; DEPOSITION; TEMPERATURE; STABILITY; ABLATION; YBA2CU3O7-DELTA; INTERFACES; MORPHOLOGY; PRESSURE;
D O I
10.1016/j.cap.2024.09.001
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Pulsed laser epitaxy (PLE) has emerged as a pivotal technique in the fabrication of complex oxide thin films, offering unprecedented control over material composition and myriads of properties. Complex oxides exhibit various functionalities, such as high-Tc superconductivity, colossal magnetoresistance, and ferroelectricity, making them essential for advanced electromagnetic and optical applications. PLE facilitates the epitaxial growth of complex oxides using a high-power pulsed laser to ablate a solid target, generating a plume of material that is deposited onto a heated substrate. The process is highly adaptable and capable of achieving stoichiometric material in thin film form with high quality. This review explores the fundamental principles, system configurations, and essential growth parameters of PLE and highlights its role in advancing the field of complex oxide thin films.
引用
收藏
页码:113 / 130
页数:18
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