Crystallization and microwave dielectric properties of CaO-B2O3-SiO2 2 O 3-SiO 2 glass-ceramic/Al2O3 2 O 3 for LTCC applications

被引:0
|
作者
Xiong, Zilong [1 ]
Tan, Feihu [1 ,2 ]
Zhang, Yi [1 ]
Wang, Qing [1 ,2 ,3 ]
Yu, Hongyu [1 ,2 ,3 ]
机构
[1] South Univ Sci & Technol, Sch Microelect, Shenzhen 518055, Peoples R China
[2] Southern Univ Sci & Technol, Engn Res Ctr Integrated Circuits Next Generat Comm, Minist Educ, Shenzhen 518055, Peoples R China
[3] Southern Univ Sci & Technol, GaN Device Engn Technol Res Ctr Guangdong, Shenzhen 518055, Peoples R China
来源
关键词
LTCC; Dielectric properties; Crystallization; Thermal conductivity; GLASS-CERAMICS; PHASE; GLASS/AL2O3; COMPOSITE; DENSIFICATION; VISCOSITY; SYSTEMS; ALKALI; OXIDE;
D O I
10.1016/j.mtcomm.2024.109787
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
High-frequency electronic devices with low dielectric loss and electronic components with high integration densities require high-performance electronic packaging materials. In this study, materials primarily composed of CaO-B2O3-SiO2 2 O 3-SiO 2 (CBS) with an elevated boron content were fabricated through solid-phase sintering using Al2O3 2 O 3 as the ceramic phase. The phase compositions, densification process, microstructures, thermal conductivity, thermal expansion, and dielectric properties of the LTCC were investigated. Remarkably, the CBS-1 LTCC composite sintered at 850 degrees C for 4 h, exhibited a dense and nonporous microstructure. It demonstrated exceptional thermoelectric properties, including a thermal shrinkage of 5.61 %, coefficients of thermal expansion of 4.86 ppm/degrees C, degrees C, thermal conductivity of 2.36 W/m & sdot;K, & sdot; K, dielectric constant (epsilon r) r ) of 4.88, and tan S of 1.05x 10-3-3 at 15 GHz. These characteristics are conducive to minimizing the signal propagation time delay and filtering noisy signals. Consequently, the CBS-1 LTCC composite emerged as a promising substrate for LTCC applications.
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页数:7
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