Bonding Behavior and Quality of Pressureless Ag Sintering on (111)-Oriented Nanotwinned Cu Substrate in Ambient Air

被引:2
作者
Huang, Xingming [1 ]
He, Wei [1 ,2 ]
Liang, Jialong [1 ,3 ]
Yang, Hao-Kun [4 ]
Zhou, Chunliang [2 ]
Liu, Zhi-Quan [1 ,3 ]
机构
[1] Chinese Acad Sci, Shenzhen Inst Adv Technol, Shenzhen 518055, Peoples R China
[2] Harbin Engn Univ, Yantai Res Inst, Yantai 264000, Peoples R China
[3] Univ Chinese Acad Sci, Shenzhen Coll Adv Technol, Shenzhen 518055, Peoples R China
[4] Hong Kong Prod Council, Smart Mfg Div, Hong Kong 999077, Peoples R China
关键词
pressureless Ag sintering; nanotwinned Cu; interfacial oxide; microstructure; bonding quality; UNIDIRECTIONAL GROWTH; LOW-TEMPERATURE; COPPER; SILVER; PERFORMANCE; MICROBUMPS; STRENGTH; JOINTS; PASTE;
D O I
10.3390/ma17174423
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
(111)-oriented nanotwinned Cu ((111)nt-Cu) has shown its high surface diffusion rate and better oxidation resistance over common polycrystalline Cu (C-Cu). The application of (111)nt-Cu as an interface metallization layer in Ag-sintered technology under the role of oxygen was investigated in this work, and its connecting behavior was further clarified by comparing it with C-Cu. As the sintering temperature decreasing from 300 to 200 degrees C, the shear strength on the (111)nt-Cu substrate was still greater than 55 MPa after sintering for 10 min. The fracture surface correspondingly changed from the interface of Ag/die to mixed fracture mode, involving the interface of the Ag/Cu substrate and Ag/die. The existence of copper oxide provided a tight connection between Ag and the (111)nt-Cu substrate at all of the studied temperatures. Although lots of small dispersed voids were seen at the interface between copper oxide and (111)nt-Cu at 300 degrees C, these impurity-induced voids would not necessarily be a failure position and could be improved by adjusting the sintering temperature and time; for example, 200 degrees C/10 min or heating to 300 degrees C, and then start cooling at the same time. The microstructure of Ag-Cu joint on (111)nt-Cu behaved better than that on C-Cu. The thinner copper oxide layer and the higher connection ratio of the interface between copper oxide and Ag were still found on the (111)nt-Cu connection's structure. The poor connection between copper oxide and Ag on C-Cu easily became the failure interface. By controlling the thickness of copper oxide and the content of impurity-induced voids, the use of (111)nt-Cu in advanced-packaging could be improved to a new level.
引用
收藏
页数:13
相关论文
共 32 条
[1]   Predicting trends in rate parameters for self-diffusion on FCC metal surfaces [J].
Agrawal, PM ;
Rice, BM ;
Thompson, DL .
SURFACE SCIENCE, 2002, 515 (01) :21-35
[2]   Effect of anisotropic grain growth on improving the bonding strength of <111>-oriented nanotwinned copper films [J].
Chang, Shih-Yang ;
Chu, Yi-Cheng ;
Tu, K. N. ;
Chen, Chih .
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2021, 804
[3]  
Chen C., 2019, ECS Transactions, V92, P147, DOI 10.1149/09207.0147ecst
[4]   Robust bonding and thermal-stable Ag-Au joint on ENEPIG substrate by micron-scale sinter Ag joining in low temperature pressure-less [J].
Chen, Chuantong ;
Zhang, Zheng ;
Wang, Qian ;
Zhang, Bowen ;
Gao, Yue ;
Sasamura, Tetsuya ;
Oda, Yukinori ;
Ma, Ninshu ;
Suganuma, Katsuaki .
JOURNAL OF ALLOYS AND COMPOUNDS, 2020, 828
[5]   Comparing the mechanical and thermal-electrical properties of sintered copper (Cu) and sintered silver (Ag) joints [J].
Chen, Tiam Foo ;
Siow, Kim Shyong .
JOURNAL OF ALLOYS AND COMPOUNDS, 2021, 866
[6]   Microstructural studies and bonding strength of pressureless sintered nano-silver joints on silver, direct bond copper (DBC) and copper substrates aged at 300 °C [J].
Chua, S. T. ;
Siow, K. S. .
JOURNAL OF ALLOYS AND COMPOUNDS, 2016, 687 :486-498
[7]   Bonding performance of sintered nanosilver joints on bare copper substrates with different grain structures [J].
Du, Cheng-Jie ;
Li, Xin ;
Mei, Yun-Hui ;
Lu, Guo-Quan .
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2019, 30 (14) :12860-12868
[8]   An explanation of sintered silver bonding formation on bare copper substrate in air [J].
Du, Cheng-Jie ;
Li, Xin ;
Mei, Yun-Hui ;
Lu, Guo-Quan .
APPLIED SURFACE SCIENCE, 2019, 490 :403-410
[9]   Unidirectional Growth of Microbumps on (111)-Oriented and Nanotwinned Copper [J].
Hsiao, Hsiang-Yao ;
Liu, Chien-Min ;
Lin, Han-Wen ;
Liu, Tao-Chi ;
Lu, Chia-Ling ;
Huang, Yi-Sa ;
Chen, Chih ;
Tu, K. N. .
SCIENCE, 2012, 336 (6084) :1007-1010
[10]   Growth mechanism of interfacial IMCs on (111) preferred orientation nanotwinned Cu UBM for 3D IC packaging [J].
Huang, M. L. ;
Wu, Y. .
2020 IEEE 70TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC 2020), 2020, :1881-1887