Force-displacement measurement system with electromagnetic and electrostatic force compensation principles

被引：1

作者：

Cherkasova, Valeriya ^{[1
]}

Froehlich, Thomas ^{[1
]}

机构：

[1] Tech Univ Ilmenau, Inst Proc Measuremnet & Sensor Technol, D-98684 Ilmenau, Germany

来源：

TM-TECHNISCHES MESSEN | 2024年 / 91卷

关键词：

Force-displacement measurement; electromagnetic force compensation; electrostatic force compensation; cantilever; MEMS;

D O I：

10.1515/teme-2024-0057

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The article presents a modified version of the force-displacement measurement device used to calibrate the stiffnesses of MEMS and cantilevers, as well as the forces they generate in the range from 10 nN to 2mN. Separately, improved results for force constants and soft cantilever stiffness calibration (force up to 300 nN) with an expanded relative uncertainty of 0.46 % are shown.

引用

页码：8 / 13

页数：6

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