Effects of Iron Catalyst Size on the Growth Behavior of Vertical Aligned Carbon Nanotube Arrays

被引:0
作者
Shiverskii, Aleksei V. [1 ]
Owais, Mohammad [1 ]
Abaimov, Sergey G. [2 ]
机构
[1] Skolkovo Inst Sci & Technol, Ctr Mat Technol, Moscow 121205, Russia
[2] Skolkovo Inst Sci & Technol, Ctr Petr Sci & Engn, Moscow 121205, Russia
关键词
Catalysts; Iron; Films; Substrates; Silicon; Temperature measurement; Sputtering; Carbon nanotubes; chemical vapor deposition; sputtering; thin films; iron nanoparticles;
D O I
10.1109/MNANO.2024.3436388
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
This research examines the growth mechanisms of Vertically Aligned Carbon Nanotube arrays (VACNTs). The synthesis of VACNTs involved the utilization of an iron catalyst deposited onto a substrate surface. Silicon substrates were coated with alumina and iron by magnetron sputtering technique. Through the application of SEM, EDX, AFM, TEM, and ellipsometry techniques, a thorough parametric investigation was conducted to elucidate the operational principles of the catalyst and its practical feasibility. Results underscore a direct relationship between the catalyst's thickness and the characteristics of the resulting VACNTs. Shown that the thickness of thin iron catalyst films of 2-3 nm allowed obtaining VACNTs with the best ID/IG bonds ratio according to Raman spectra.
引用
收藏
页码:30 / 36
页数:7
相关论文
共 3 条
[1]   Carbon nanotubes: Synthesis, integration, and properties [J].
Dai, HJ .
ACCOUNTS OF CHEMICAL RESEARCH, 2002, 35 (12) :1035-1044
[2]   Catalyst design for the growth of highly packed nanotube forests [J].
Esconjauregui, Santiago ;
Fouquet, Martin ;
Bayer, Bernhard C. ;
Ducati, Caterina ;
Robertson, John .
PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 2011, 248 (11) :2528-2531
[3]   Carbon nanotubes prepared by anodic aluminum oxide template method [J].
Hou PengXiang ;
Liu Chang ;
Shi Chao ;
Cheng HuiMing .
CHINESE SCIENCE BULLETIN, 2012, 57 (2-3) :187-204